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ASQ has a reputation for providing the best quartz boats for 21 years. Our patented Angle Slot Quartz boats improve process uniformity, reduce particle counts and enhance the device yield. We will provide you with optimal boats for your process and surrounding tools. Please fill out the Customer Data Sheet so we can design the right boat for you. Advantages of Angle Slotted Quartz Boats Conventional diffusion boats rely on narrow slot widths to hold wafers at equal distances. The narrow slot width and the typical "Y"-shaped slot cause numerous thermal stress related problems, such as wafer chipping, breakage and many others. To address this problem, ASQ Technology invented and has been manufacturing Angle Slotted Quartz boats for the last 21 years. In ASQ boats, slots are cut at an angle so that loaded wafers lean at 3°. This keeps all wafers parallel to each other and at precise, equal distances even though the slot width is twice that of the wafer. This equal spacing enhances wafer temperature uniformity, and gas flow dynamics between wafers. As a result, ASQ boats improve process uniformity in oxidation, CVD, diffusion and plasma operation. This wider slot width and the elliptical shaped bottom slots completely eliminate any thermal stress related problems that are common to conventional boats. The following are all advantages of ASQ boats:
If you are interested, please contact us. We would be happy to send you additional information or design the optimal boats for your processes and surrounding tools.
ASQ Technology,
Inc.
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