We manufacture the following products:

Fig. LT-1, 200 mm LTO Boat
Non-contiguous boat with 2 end walls
3° angle slots
13 pair proximity B-to-B slots at .500" pitch
Boat length=7.25"
For pick up handle, see Fig. LF-2, LF-5, LF-6

Fig. LT-2, 150 mm LTO Baffle Boat
Non-contiguous boat with one end wall
3° angle slots
13 pair proximity B-to-B slots at .563" pitch
Boat length=7.25"
For pick up handle, see Fig. LF-5, LF-6

Fig. LT-3, LTO Cage Boat Train
Consists of 2 baffle boats at both ends and 3 process boats in the middle. The baffle boat contains dummy wafers. The number of process boats can be 1 to 6 or 0 depending on number of wafers per run. All wafers are contiguous throughout the train.

Fig. BN-1, 100 mm BN Boat
Contiguous
3° angle slots
13 BN slots + 26 Si slots at 3/8" pitch
Boat length=4.97"
For pick up handle, see Fig. LF-3, LF-4

Fig. BN-2, 100 mm B+ Boat
Non-contiguous
3° angle slots
13 B+ slots + 26 Si slots at 3/8" pitch
Boat length=6.10"
For pick up handle, see Fig. LF-3, LF-4

Fig. OX-1, 300 mm Quartz Boat
Contiguous
3° angle slots
13 slots at 10mm pitch
Boat length=5.13"
For pick up handle, see Fig. LF-1, LF-2 or LF-3, LF-4.

Fig. OX-2, 300 mm Boat
Non-Contiguous
3° angle slots
13 slots at 10mm pitch
Boat length=6.23"
For pick up handle, see Fig. LF-9, LF-10.

Fig. OX-3, 200 mm Boat
Contiguous
3° angle slots
25 slots at 1/4" pitch
Boat length=6.26"
For pick up handle, see Fig. LH-1, LH-2, LH-3, LH-4.

Fig. OX-4, 200 mm Boat
Non-Contiguous
3° angle slots
25 slots at 1/4" pitch
Boat length=7.51"
For pick up handle, see Fig. LH-9, LH-10.

Fig. OX-5, 150 mm Boat
Contiguous Boat
3° angle slots
50 slots at 3/32" pitch
Boat length= 4.98"
For pick up handle, see Fig. LH-3, LH-4.

Fig. OX-6, 150 mm Boat
Contiguous
3° angle slots
13 pair proximity B/B slots at 3/8" pitch
Boat length= 5.63"
For pick up handle, see Fig. LH-3, LH-4.

Fig. OX-7, 150 mm Boat
Contiguous
3° angle slots
25 slots at 3/16" pitch
Boat length= 4.70"
For pick up handle, see Fig. LH-1, LH-2, LH-3, LH-4.

Fig. OX-8, 150 mm Quartz Boat
Non-Contiguous
3° angle slots
50 slots at 3/32" pitch
Boat length=5.76"
For pick up handle, see Fig. LH-9, LH-10.

Fig. OX-9, 150 mm Quartz Boat
Non-Contiguous
3° angle slots
50 slots at 3/32" pitch
Boat length=5.76"
For pick up handle, see Fig. LH-3, LH-4.

Fig. OX-10, 4" Quartz Boat
Contiguous
3° angle slots
50 slots at 3/32" pitch
Boat length=4.79"
For pick up handle, see Fig. LH-3, LH-4.

Fig. OX-11, 4" Boat
Non-Contiguous
3° angle slots
50 slots at 3/32" pitch
Boat length= 5.95"
For pick up handle, see Fig. LH-9, LH-10.

Fig. OX-12, 4" Boat
Loop and Protective Plate
3° angle slots
25 slots at 3/16" pitch
Boat length= 8.68"
No pick up handle

Fig. OX-13, 3" Boat
Contiguous
3° angle slots
12 slots at .360" pitch
3 different wafer thicknesses, 1 mm, 2 mm, and 3 mm, can be accommodated in one boat.
Boat length= 4.61"
For pick up handle, see Fig. LH-3, LH-4.

Fig. OX-14, 2" Boat
Non-Contiguous
3° angle slots
50 slots at 3/16" pitch
Boat length= 10.70"
No Pick up handle

Fig. SQ-1, 103mm Square Wafer Boat
3° angle slots
25 slots at 3/16" pitch
Boat length= 4.86"
For pick up handle, see Fig. LH-3, LH-4.

Fig. SQ-2, 125mm Square Wafer Boat
3° angle slots
25 slots at 3/16" pitch
Boat length= 4.81"
For pick up handle, see Fig. LH-3, LH-4.

Fig. HT-1, 4" Hi-Temp Boat
Up to 1275° C
3° angle slots
50 slots at 3/32" pitch
Boat length= 4.80"
For pick up handle, see Fig. LH-3, LH-4.

Fig. HT-2, 3" Hi-Temp Boat
Up to 1275° C
3° angle slots
49 slots at 3/16" pitch
Boat length= 9.26"
For pick up handle, see Fig. LH-3, LH-4.

Fig. QT-1, 150mm Quartz Tower
For vertical furnaces

Fig. QT-2, 200mm Quartz Tower
For vertical furnaces
0° angle slots
61 slots at 3/16" pitch
Boat length= 12.39"
No pick up handle

Fig. QT-3, 150mm Quartz Tower
3° angle slots
25 slots at 0.238" pitch
Boat length= 6.05"
For pick up handle, see Fig. LH-9, LH-10.

Fig. QT-4, 3" Quartz Tower
3° angle slots
25 slots at .200" pitch
Boat length= 6"
For pick up handle, see Fig. LH-9, LH-10.

Fig. QT-5, 4.5" Square Wafer Tower
0° angle slots
18 slots at .200" pitch
Boat length= 6.11"
No pick up handle

Fig. SiC-1, 8" Silicon Carbide Boat
Contiguous design
3° angle slots
50 slots at .125" pitch
Boat length= 6.425"
For pick up handle, see Fig. LH-8

Fig. SiC-2, 6" Silicon Carbide Boat
Contiguous design
3° angle slots
25 slots at 3/16" pitch
Boat length= 4.72"
For pick up handle, see Fig. LH-8

Fig. SiC-3, 6" Silicon Carbide Boat
Contiguous design
3° angle slots
50 slots at 3/32" pitch
Boat length= 4.845"
For pick up handle, see Fig. LH-8

Fig. LH-1, Side Lift Handle With
Dual Pistol Grips
Vespel blade
For 200 mm and 300 mm boats

Fig. LH- 2, Side Lift Handle With
Dual Pistol Grips
Vespel blade
For 200 mm and 300 mm boats

Fig. LH-3, Side Lift Handle
Vespel blade
For 150 mm and/or smaller wafer boats

Fig. LH-4, Side Lift Handle
Vespel blade
For 150 mm and/or smaller wafer boats

Fig. LH-5, Side Lift Handle
For LTO boats

Fig. LH-6, Side Lift Handle
For LTO boats

Fig. LH-7, Side Lift Handle
For SiC boats

Fig. LH-8, Side Lift Handle For SiC Boats
For SiC boats

Fig. LH-9, Lift Fork
For non-contiguous or contiguous boats

Fig. LH-10, Lift Fork
For non-contiguous or contiguous boats

Fig. LH-11, Lift Fork
For non-contiguous or contiguous boats

Fig. LH-12, Lift Fork
For contiguous boats

Fig. MTM-1

Most auto loaders require constant, time consuming calibration by a highly trained technician. If not properly maintained, the auto loaders scratch and even break wafers. ASQ developed the MTM along with our patented angle slot boats to satisfy the needs of quality wafer transfer between cassettes and quartz or SiC boats.

No maintenance or calibration required - highly reliable. Transfers 25 wafers from a cassette (Teflon or plastic) to a quartz or SiC boat, and vice versa. Easy operation - no extensive training required. Transfer takes less than 40 seconds. No hands touch the quartz boat. No wafer chipping, no scratching and no breakage. Angle slot boats reduce particle contamination, enhance uniformity, throughput and yield. Similar or better performance with one-tenth the cost of an auto loader.

ASQ Technology, Inc.
951 Calle Negocio
San Clemente, CA 92673

Tel : 949-498-4000
Fax : 949-498-9572
Email : sales@asqtech.com