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We manufacture the following products:
I. QUARTZ BOATS
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Fig.
LT-1, 200
mm LTO Boat |
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| Non-contiguous
boat with 2 end walls |
| 3°
angle slots |
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| 13
pair proximity B-to-B slots at .500" pitch |
| Boat
length=7.25" |
| For
pick up handle, see Fig. LF-2, LF-5, LF-6 |
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Fig.
LT-2,
150 mm LTO Baffle Boat |
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| Non-contiguous
boat with one end wall |
| 3°
angle slots |
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| 13
pair proximity B-to-B slots at .563" pitch |
| Boat
length=7.25" |
| For
pick up handle, see Fig. LF-5, LF-6 |
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Fig.
LT-3,
LTO
Cage Boat Train |
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| Consists
of 2 baffle boats at both ends and 3 process boats in the middle.
The baffle
boat contains dummy wafers. The number of process boats can be 1
to 6 or 0 depending on number of wafers per run. All wafers are
contiguous throughout the train. |
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Fig.
BN-1,
100 mm BN Boat |
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| Contiguous
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| 3°
angle slots |
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| 13
BN slots + 26 Si slots at 3/8" pitch |
| Boat
length=4.97" |
| For
pick up handle, see Fig. LF-3, LF-4 |
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Fig.
BN-2,
100 mm B+ Boat |
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| Non-contiguous |
| 3°
angle slots |
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| 13
B+ slots + 26 Si slots at 3/8" pitch |
| Boat
length=6.10" |
| For
pick up handle, see Fig. LF-3, LF-4 |
| I.3
& I.4 CVD / Oxidation / Anneal Boats |
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Fig.
OX-1, 300
mm Quartz Boat |
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| Contiguous |
| 3°
angle slots |
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| 13
slots at 10mm pitch |
| Boat
length=5.13" |
| For
pick up handle, see Fig. LF-1, LF-2 or LF-3, LF-4. |
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Fig.
OX-2,
300 mm Boat |
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| Non-Contiguous |
| 3°
angle slots |
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| 13
slots at 10mm pitch |
| Boat
length=6.23" |
| For
pick up handle, see Fig. LF-9, LF-10. |
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Fig.
OX-3, 200
mm
Boat |
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| Contiguous |
| 3°
angle slots |
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| 25
slots at 1/4" pitch |
| Boat
length=6.26" |
| For
pick up handle, see Fig. LH-1, LH-2, LH-3, LH-4. |
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Fig.
OX-4, 200
mm Boat |
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| Non-Contiguous |
| 3°
angle slots |
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| 25
slots at 1/4" pitch |
| Boat
length=7.51" |
| For
pick up handle, see Fig. LH-9, LH-10. |
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Fig.
OX-5, 150 mm Boat |
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| Contiguous
Boat |
| 3°
angle slots |
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| 50
slots at 3/32" pitch |
| Boat
length= 4.98" |
| For
pick up handle, see Fig. LH-3, LH-4. |
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Fig.
OX-6, 150 mm Boat |
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|
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| Contiguous |
| 3°
angle slots |
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| 13
pair proximity B/B slots at 3/8" pitch |
| Boat
length= 5.63" |
| For
pick up handle, see Fig. LH-3, LH-4. |
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Fig.
OX-7, 150
mm Boat |
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| Contiguous |
| 3°
angle slots |
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| 25
slots at 3/16" pitch |
| Boat
length= 4.70" |
| For
pick up handle, see Fig. LH-1, LH-2, LH-3, LH-4. |
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Fig.
OX-8, 150
mm Quartz Boat |
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| Non-Contiguous |
| 3°
angle slots |
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| 50
slots at 3/32" pitch |
| Boat
length=5.76" |
| For
pick up handle, see Fig. LH-9, LH-10. |
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Fig.
OX-9,
150 mm Quartz Boat |
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| Non-Contiguous |
| 3°
angle slots |
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| 50
slots at 3/32" pitch |
| Boat
length=5.76" |
| For
pick up handle, see Fig. LH-3, LH-4. |
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Fig.
OX-10,
4" Quartz Boat |
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| Contiguous |
| 3°
angle slots |
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| 50
slots at 3/32" pitch |
| Boat
length=4.79" |
| For
pick up handle, see Fig. LH-3, LH-4. |
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Fig.
OX-11, 4"
Boat |
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| Non-Contiguous |
| 3°
angle slots |
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| 50
slots at 3/32" pitch |
| Boat
length= 5.95" |
| For
pick up handle, see Fig. LH-9, LH-10. |
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Fig.
OX-12, 4"
Boat |
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| Loop
and Protective Plate |
| 3°
angle slots |
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| 25
slots at 3/16" pitch |
| Boat
length= 8.68" |
| No
pick up handle |
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Fig.
OX-13, 3"
Boat |
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| Contiguous |
| 3°
angle slots |
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| 12
slots at .360" pitch |
| 3
different wafer thicknesses, 1 mm, 2 mm, and 3 mm, can be accommodated
in one boat. |
| Boat
length= 4.61" |
| For
pick up handle, see Fig. LH-3, LH-4. |
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Fig.
OX-14, 2"
Boat |
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| Non-Contiguous |
| 3°
angle slots |
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| 50
slots at 3/16" pitch |
| Boat
length= 10.70" |
| No
Pick up handle |
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Fig.
SQ-1, 103mm Square Wafer Boat |
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| 3°
angle slots |
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| 25
slots at 3/16" pitch |
| Boat
length= 4.86" |
| For
pick up handle, see Fig. LH-3, LH-4. |
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Fig.
SQ-2, 125mm Square Wafer Boat |
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| 3°
angle slots |
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| 25
slots at 3/16" pitch |
| Boat
length= 4.81" |
| For
pick up handle, see Fig. LH-3, LH-4. |
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Fig.
HT-1, 4" Hi-Temp Boat |
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| Up
to 1275° C |
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| 3°
angle slots |
| 50
slots at 3/32" pitch |
| Boat
length= 4.80" |
| For
pick up handle, see Fig. LH-3, LH-4. |
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Fig.
HT-2, 3" Hi-Temp
Boat |
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| Up
to 1275° C |
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| 3°
angle slots |
| 49
slots at 3/16" pitch |
| Boat
length= 9.26" |
| For
pick up handle, see Fig. LH-3, LH-4. |
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Fig.
QT-1, 150mm
Quartz Tower |
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| For
vertical furnaces |
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Fig.
QT-2, 200mm
Quartz Tower |
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| For
vertical furnaces |
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| 0°
angle slots |
| 61
slots at 3/16" pitch |
| Boat
length= 12.39" |
| No
pick up handle |
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Fig.
QT-3, 150mm
Quartz Tower |
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| 3°
angle slots |
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| 25
slots at 0.238" pitch |
| Boat
length= 6.05" |
| For
pick up handle, see Fig. LH-9, LH-10. |
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Fig.
QT-4, 3" Quartz
Tower |
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| 3°
angle slots |
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| 25
slots at .200" pitch |
| Boat
length= 6" |
| For
pick up handle, see Fig. LH-9, LH-10. |
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Fig.
QT-5, 4.5" Square
Wafer Tower |
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| 0°
angle slots |
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| 18
slots at .200" pitch |
| Boat
length= 6.11" |
| No
pick up handle |
| II.
SILICON CARBIDE BOATS |
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Fig.
SiC-1, 8" Silicon Carbide Boat |
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| Contiguous
design |
| 3°
angle slots |
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| 50
slots at .125" pitch |
| Boat
length= 6.425" |
| For
pick up handle, see Fig.
LH-8 |
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Fig.
SiC-2, 6" Silicon Carbide Boat |
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| Contiguous
design |
| 3°
angle slots |
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| 25
slots at 3/16" pitch |
| Boat
length= 4.72" |
| For
pick up handle, see Fig.
LH-8 |
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Fig.
SiC-3, 6" Silicon Carbide Boat |
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| Contiguous
design |
| 3°
angle slots |
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| 50
slots at 3/32" pitch |
| Boat
length= 4.845" |
| For
pick up handle, see Fig.
LH-8 |
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Fig.
LH-1, Side
Lift Handle With |
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|
Dual
Pistol Grips |
| Vespel
blade |
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| For
200 mm and 300 mm boats |
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Fig.
LH- 2, Side
Lift Handle With |
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|
Dual Pistol Grips |
| Vespel
blade |
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| For
200 mm and 300 mm boats |
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Fig.
LH-3,
Side
Lift Handle
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|
Vespel blade |
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| For
150 mm and/or smaller wafer boats |
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Fig.
LH-4,
Side Lift Handle |
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| Vespel
blade |
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| For
150 mm and/or smaller wafer boats |
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Fig.
LH-5, Side
Lift Handle |
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| For
LTO boats |
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Fig.
LH-6, Side
Lift Handle |
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| For
LTO boats |
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Fig.
LH-7, Side
Lift Handle |
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| For
SiC boats |
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Fig.
LH-8, Side
Lift Handle
For SiC Boats |
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| For
SiC boats |
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Fig.
LH-9, Lift
Fork |
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| For
non-contiguous or contiguous boats |
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Fig.
LH-10, Lift Fork |
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| For
non-contiguous or contiguous boats |
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Fig.
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