We manufacture the following products:

I.  QUARTZ BOATS
 
  1. LTO Cage Boats
  2. Solid Source Boats
  3. CVD Boats
    • Poly  Deposition Boats
    • Nitride Deposition Boats
    • TEOS Deposition Boats
  4. Oxidation and Annealing Boats
  5. Square Wafer Boats
  6. Hi-Temp Boats
  7. Quartz Tower
II. SILICON CARBIDE BOATS
III. BOAT LIFT HANDLES
IV. MANUAL WAFER TRANSFER MACHINES

I. QUARTZ BOATS

I.1 LTO Cage Boats
   
Fig. LT-1, 200 mm LTO Boat
Non-contiguous boat with 2 end walls
3° angle slots
13 pair proximity B-to-B slots at .500" pitch
Boat length=7.25"
For pick up handle, see Fig. LF-2, LF-5, LF-6
 
Fig. LT-2, 150 mm LTO Baffle Boat
Non-contiguous boat with one end wall
3° angle slots
13 pair proximity B-to-B slots at .563" pitch
Boat length=7.25"
For pick up handle, see Fig. LF-5, LF-6
 
Fig. LT-3, LTO Cage Boat Train
Consists of 2 baffle boats at both ends and 3 process boats in the middle. The baffle boat contains dummy wafers. The number of process boats can be 1 to 6 or 0 depending on number of wafers per run. All wafers are contiguous throughout the train.

 

I.2 Solid Source Boats
   
Fig. BN-1, 100 mm BN Boat
Contiguous
3° angle slots
13 BN slots + 26 Si slots at 3/8" pitch
Boat length=4.97"
For pick up handle, see Fig. LF-3, LF-4
 
Fig. BN-2, 100 mm B+ Boat
Non-contiguous
3° angle slots
13 B+ slots + 26 Si slots at 3/8" pitch
Boat length=6.10"
For pick up handle, see Fig. LF-3, LF-4



I.3 & I.4 CVD / Oxidation / Anneal Boats
   
Fig. OX-1, 300 mm Quartz Boat
Contiguous
3° angle slots
13 slots at 10mm pitch
Boat length=5.13"
For pick up handle, see Fig. LF-1, LF-2 or LF-3, LF-4.
 
Fig. OX-2, 300 mm Boat
Non-Contiguous
3° angle slots
13 slots at 10mm pitch
Boat length=6.23"
For pick up handle, see Fig. LF-9, LF-10.
 
Fig. OX-3, 200 mm Boat
Contiguous
3° angle slots
25 slots at 1/4" pitch
Boat length=6.26"
For pick up handle, see Fig. LH-1, LH-2, LH-3, LH-4.
 
Fig. OX-4, 200 mm Boat
Non-Contiguous
3° angle slots
25 slots at 1/4" pitch
Boat length=7.51"
For pick up handle, see Fig. LH-9, LH-10.
 
Fig. OX-5, 150 mm Boat
Contiguous Boat
3° angle slots
50 slots at 3/32" pitch
Boat length= 4.98"
For pick up handle, see Fig. LH-3, LH-4.
 
Fig. OX-6, 150 mm Boat
Contiguous
3° angle slots
13 pair proximity B/B slots at 3/8" pitch
Boat length= 5.63"
For pick up handle, see Fig. LH-3, LH-4.
 
Fig. OX-7, 150 mm Boat
Contiguous
3° angle slots
25 slots at 3/16" pitch
Boat length= 4.70"
For pick up handle, see Fig. LH-1, LH-2, LH-3, LH-4.
 
Fig. OX-8, 150 mm Quartz Boat
Non-Contiguous
3° angle slots
50 slots at 3/32" pitch
Boat length=5.76"
For pick up handle, see Fig. LH-9, LH-10.
 
Fig. OX-9, 150 mm Quartz Boat
Non-Contiguous
3° angle slots
50 slots at 3/32" pitch
Boat length=5.76"
For pick up handle, see Fig. LH-3, LH-4.
 
Fig. OX-10, 4" Quartz Boat
Contiguous
3° angle slots
50 slots at 3/32" pitch
Boat length=4.79"
For pick up handle, see Fig. LH-3, LH-4.
 
Fig. OX-11, 4" Boat
Non-Contiguous
3° angle slots
50 slots at 3/32" pitch
Boat length= 5.95"
For pick up handle, see Fig. LH-9, LH-10.
 
Fig. OX-12, 4" Boat
Loop and Protective Plate
3° angle slots
25 slots at 3/16" pitch
Boat length= 8.68"
No pick up handle
 
Fig. OX-13, 3" Boat
Contiguous
3° angle slots
12 slots at .360" pitch
3 different wafer thicknesses, 1 mm, 2 mm, and 3 mm, can be accommodated in one boat.
Boat length= 4.61"
For pick up handle, see Fig. LH-3, LH-4.
 
Fig. OX-14, 2" Boat
Non-Contiguous
3° angle slots
50 slots at 3/16" pitch
Boat length= 10.70"
No Pick up handle

 

I.5 Square Wafer Boats
   
Fig. SQ-1, 103mm Square Wafer Boat
3° angle slots
25 slots at 3/16" pitch
Boat length= 4.86"
For pick up handle, see Fig. LH-3, LH-4.
 
Fig. SQ-2, 125mm Square Wafer Boat
3° angle slots
25 slots at 3/16" pitch
Boat length= 4.81"
For pick up handle, see Fig. LH-3, LH-4.

 

I.6 Hi-Temp Boats
   
Fig. HT-1, 4" Hi-Temp Boat
Up to 1275° C
3° angle slots
50 slots at 3/32" pitch
Boat length= 4.80"
For pick up handle, see Fig. LH-3, LH-4.
 
Fig. HT-2, 3" Hi-Temp Boat
Up to 1275° C
3° angle slots
49 slots at 3/16" pitch
Boat length= 9.26"
For pick up handle, see Fig. LH-3, LH-4.

 

I.7 Quartz Tower
   
Fig. QT-1, 150mm Quartz Tower
For vertical furnaces
 
 
 
 
Fig. QT-2, 200mm Quartz Tower
For vertical furnaces
0° angle slots
61 slots at 3/16" pitch
Boat length= 12.39"
No pick up handle
 
Fig. QT-3, 150mm Quartz Tower
3° angle slots
25 slots at 0.238" pitch
Boat length= 6.05"
For pick up handle, see Fig. LH-9, LH-10.
 
Fig. QT-4, 3" Quartz Tower
3° angle slots
25 slots at .200" pitch
Boat length= 6"
For pick up handle, see Fig. LH-9, LH-10.
 
Fig. QT-5, 4.5" Square Wafer Tower
0° angle slots
18 slots at .200" pitch
Boat length= 6.11"
No pick up handle

 

II. SILICON CARBIDE BOATS
   
Fig. SiC-1, 8" Silicon Carbide Boat
Contiguous design
3° angle slots
50 slots at .125" pitch
Boat length= 6.425"
For pick up handle, see Fig. LH-8
 
Fig. SiC-2, 6" Silicon Carbide Boat
Contiguous design
3° angle slots
25 slots at 3/16" pitch
Boat length= 4.72"
For pick up handle, see Fig. LH-8
 
Fig. SiC-3, 6" Silicon Carbide Boat
Contiguous design
3° angle slots
50 slots at 3/32" pitch
Boat length= 4.845"
For pick up handle, see Fig. LH-8

 

III. BOAT LIFT HANDLES
   
Fig. LH-1, Side Lift Handle With
Dual Pistol Grips
Vespel blade
For 200 mm and 300 mm boats
 
 
 
Fig. LH- 2, Side Lift Handle With
Dual Pistol Grips
Vespel blade
For 200 mm and 300 mm boats
 
 
 
Fig. LH-3, Side Lift Handle
Vespel blade
For 150 mm and/or smaller wafer boats
 
 
 
Fig. LH-4, Side Lift Handle
Vespel blade
For 150 mm and/or smaller wafer boats
 
 
 
Fig. LH-5, Side Lift Handle
For LTO boats
 
 
 
 
Fig. LH-6, Side Lift Handle
For LTO boats
 
 
 
 
Fig. LH-7, Side Lift Handle
For SiC boats
 
 
 
 
Fig. LH-8, Side Lift Handle For SiC Boats
For SiC boats
 
 
 
 
Fig. LH-9, Lift Fork
For non-contiguous or contiguous boats
 
 
 
 
Fig. LH-10, Lift Fork
For non-contiguous or contiguous boats
 
 
 
 
Fig.