A new boat design starts with information from the customer; furnace tube ID, the location of injector or TC tubes in the furnace, cantilever paddle dimension, process and temperature, type of wafer transfer machine, and boat lift handles (see Customer Data Sheet).  We then pull out sections of existing boat designs from our design database and assemble the section designs to complete a new boat that fits optimally with the customer's specification.  The simple design procedure enables us to provide our customers with custom designed boats with prices of standard quartz boats.

For years, process engineers have had to endure the nightmares of wafer jamming, pinching, breaking, scratching and warping. These problems stem from primitively designed, vertically slotted boats that hold wafers tightly in narrow slots. This problem provided an opportunity for ASQ Technology to develop an ingenious, patented concept in angle slot boat design that is so simple and useful that it has positioned ASQ as the preeminent leader in wafer diffusion technology.

In ASQ boats, slots are cut at an angle so that loaded wafers lean in one direction.  This keeps all wafers parallel to each other and at precise, equal distances even though the slot width is twice that of the wafer.  The equal wafer spacing enhances uniformity in wafer temperature and gas flow between wafers.  As a result, ASQ boats improve process uniformity in oxidation, CVD, diffusion and plasma operation.  The bottom slots have an elliptical shape resembling bird nests in nature to protect wafers.  The wide slot width of upper slots and the elliptical shaped bottom slots completely eliminate any thermal-stress related problems that are common to conventional boats.

We provide unique solutions for specific diffusion problems of our customers.  If you have any wafer chipping after thick poly deposition, crystal slip, bonded wafer separation or any other problems, please call us for solutions.