Please complete the following specifications as thoroughly as possible so that ASQ Technology can provide the best quartzware for your process and surrounding tools.

If there are any uncertainties or questions please feel free to call or email us at Sales@asqtech.com for assistance.

Title:
 Mr. Ms. Dr.
Name:
Company:
Line of Business:
Job Title:
Phone:
Fax:
E-mail:
Address:
City, State:
ZIP/Postal Code:
Country:
   
WAFER
 
Shape:
 Round Square  
Diameter/Size:
  
Thickness:
  
Edge Beveled:
YES   NO
 
Material:

Si     GaAs

Other:
 
FURNACE OVEN OR CHAMBER 
Horizontal Furnace
Vertical Furnace
Furnace Tube ID:
Do you have thermocouples / injectors in furnace tube? If yes, tube size & location:
 
Oven Size:
  
W:
 
H:
 
D:
 
Plasma Chamber Size:
   
PROCESSES  
Oxidation
Bake Dry
Poly LPCVD
Plasma Etch /Ash
Nitride LPCVD
POCl3
LTO
Solid Source (BN, B+, Ph)
Anneal/Sinter
 
 
 
Other Process:
Process Temperature:
   
QUARTZ BOAT CONFIGURATION
Current:
   Future Plan:
Angle Slot
Vertical Slot
Contiguous Boat
Non-contiguous Boat
Quartz Tower
(Vertical Furnace)
Lift Handle:
 Side Front  
No. of Slots:
  
Slot Pitch (center to center distance):  
     
WAFER LOADING METHOD 
Tweezers/Vacuum Wand
  
Dump Transfer, Vendor:
Slide Transfer, Vendor:
Auto Mass Transfer, Vendor:
Robotic Single Wafer Transfer
  
   
WAFER LOADING CONFIGURATION
Single wafer one direction
Contact back-to-back loading
Proximity back-to-back loading
 
PADDLE/CANTILEVER
Push Rod with: Boat Sled Truck
Sled/Truck Auto Pushed/Pulled
Cantilever Paddle, Manuf:
Part No.
Drawing Available?
Yes No